Plasma Processing especially Etching
Plasma (Etching)
This site is devoted to plasma processing (etching) in semiconductor
manufacturing. Actually you can find the following items on this site:
- An unfinished tutorial on low temperature plasma processing
in html or
pdf.
- A paper on PFC emission reduction during
tungsten etchback process together with the related
presentation from the SPIE conference in Edinburgh (May 2001).