Within this site you can find mainly material related to CMOS based semiconductor manufacturing, especially plasma processing and ion implantation. Special semiconductor devices (at moment only the FETMOS) are also covered briefly.
An at moment small, but in future surely large section on this site is handling data analysis / integration in semiconductor manufacturing. Here are plenty of fields to be discussed, like the a bit outdated SPC (statistic process control) or APC (advanced process control) and FDC (fault detection and classification) as well as the various aspects of yield analysis (defects, manufacturing history ...).
For some of the topics covered on this site software utilities
or demonstrations with (hopefully) some practical benefit are
provided. They are mainly implemented in
Pdf is extensively used throughout this site, you might want to
download
The site is privately owned and maintained. There is no relation to my employer Hitachi Semiconductor (Europe) GmbH, or from first of April 2003 RENESAS Semiconductor Europe (Landshut) GmbH.