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Within this site you can find mainly material related to CMOS based semiconductor manufacturing, especially plasma etching and ion implantation. A growing section on this site is handling data analysis / integration in semiconductor manufacturing. Here are plenty of fields to be discussed, like the SPC (statistic process control) or R2R (run to run control) and FDC (fault detection and classification) as well as the various other aspects.

For some of the topics covered on this site software utilities or demonstrations with (hopefully) some practical benefit are provided. They are mainly implemented in Python, simply due to the fact, that many bindings to scientific libraries and programs are available. Other used languages are Ruby and Perl. In this section you can find also, a bit of topic, the simple Perl application which is used to create this site.

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The information and software on this site is distributed in the hope that it will be useful but without any warranty. The author(s) do not accept responsibility to anyone for the consequences of using it or for whether it serves any particular purpose or works at all. No warranty is made about the software or its performance.

Use and copying of this software and the preparation of derivative works based on this software are permitted, so long as the following conditions are met:


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