next up previous contents index
Next: Wave Heated Discharges Up: Commonly used Plasma Sources Previous: Capacitive Discharges   Contents   Index


Inductive Discharges

wavelength in icp is 30m

Figure: principle of ICP
\includegraphics{icp_principle}

Figure: capacitive coupling in the ICP
\includegraphics{icp_cap_couple}




back to www.gs68.de

Other important things: Legal Notice, Contact us

Copyright © 2001-2012 Spitzlsperger Technologies GmbH