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Ion Stopping

When the implanted ion enters the target material there are two main effects that causes an energy loss:

Means the total stopping power $S$ defined as the energy loss per unit path length of the ion can be defined as:

S = \left( \frac{dE}{dx} \right)_{\mbox{nuclear}} +
\left( \frac{dE}{dx}\right)_{\mbox{electronic}}.
\end{displaymath} (2)

From fig. [*] it can be seen that at low ion velocities nuclear stopping dominates, whereas at higher velocities the energy is transfered to the electrons of the target material.

Figure: Ion stopping

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