next up previous contents index
Next: Photo Resist Stripping Up: Introduction Previous: Wave Heated Discharges   Contents   Index

Typical Etch Processes in Submicron CMOS Technology

Within this section some of the typical applications of plasma etching in modern CMOS processes will be discussed. The material should give some basic understanding for the specific issues of the different applications like gate etch or contact etch. Hereby you should never forget that etching is just a part (even an important one) of the total manufacturing process and the final goal is to integrate all processes to yield good wafers.


back to

Other important things: Legal Notice, Contact us

Copyright © 2001-2012 Spitzlsperger Technologies GmbH